Method of manufacturing a thin-film magnetic head having an...

Details Method of manufacturing a thin-film magnetic head having an... Method of manufacturing a thin-film magnetic head having an...

2007-03-19

2010-10-12

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603150, C029S603160, C029S603180, C216S022000, C216S044000, C360S125100, C360S125470, C360S125520, C360S125650

Reexamination Certificate

active

07810226

ABSTRACT:
A manufacturing method of a thin-film element having a lower layer with a narrower width is provided, which comprises steps of: forming a first film and a second film on the first film; forming a second layer having a width WUPobtained by trimming the second film; forming a mask film having a smaller etching rate than the first film so as to cover the second layer; forming a pattern having a width WTRlarger than the width WUP, obtained by collectively trimming the mask film covering the second layer and at least an upper portion of the first film; and forming a first layer having a width WLOsmaller than the width WUPor having a portion with a width WLOsmaller than the width WUP, obtained by trimming the first film without changing the width WUPof the second layer.

REFERENCES:
patent: 5867890 (1999-02-01), Hsiao et al.
patent: 2006/0044681 (2006-03-01), Le et al.
patent: 04-006603 (1992-01-01), None
patent: 07-093711 (1995-04-01), None
patent: 09-063017 (1997-03-01), None
patent: 10-105919 (1998-04-01), None
patent: 2003-242608 (2003-08-01), None
patent: 2005-063562 (2005-03-01), None
patent: 2005158192 (2005-06-01), None
patent: 2005-332484 (2005-12-01), None
patent: 2005-346786 (2005-12-01), None
Japanese Office Action dated Oct. 14, 2008.

Affiliated with

Also associated with

Rating

Method of manufacturing a thin-film magnetic head having an... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of manufacturing a thin-film magnetic head having an..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of manufacturing a thin-film magnetic head having an... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4194939