Method of manufacturing a TFT array substrate

Details Method of manufacturing a TFT array substrate Method of manufacturing a TFT array substrate

2011-03-29

2011-03-29

Weiss, Howard (Department: 2814)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

C438S544000, C438S155000, C438S608000, C438S729000

Reexamination Certificate

active

07915062

ABSTRACT:
A TFT array substrate includes a TFT having an ohmic contact film and a source electrode and a drain electrode formed on the ohmic contact film. It also includes a pixel electrode electrically connected with the drain electrode. The source electrode and the drain electrode are made of an Al alloy containing Ni as an additive.

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