Method of manufacturing a tactile sensor

Details Method of manufacturing a tactile sensor Method of manufacturing a tactile sensor

2008-01-01

2008-01-01

Kim, Paul D. (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S025350, C029S592100, C029S846000, C204S192320, C204S192330, C204S192350, C216S062000, C216S066000, C216S067000, C310S330000, C310S331000, C310S332000, C361S170000, C361S189000, C073S865400

Reexamination Certificate

active

11024316

ABSTRACT:
A method of manufacturing a tactile sensor, which is capable of implementing a wide range of senses, including sensing contact pressure (vertical force and horizontal force) with an external object and heat caused by the contact pressure, comprises forming a side block formation pattern of a force sensor and forming a piezo-resistor formation pattern of a heat sensor; forming a piezo-resistor and depositing an oxide film on the piezo-resistor; forming contact holes and forming a line hole formation pattern; forming a metal line, a temperature measurement metal line, and a heater; depositing an oxide film on the metal line, the temperature measurement metal line, and the heater, and forming a load block on the oxide film; and forming a side block by etching a bottom surface of the wafer on which the load block is formed.

REFERENCES:
patent: 4766666 (1988-08-01), Sugiyama et al.
patent: 4856993 (1989-08-01), Maness et al.
patent: 6515586 (2003-02-01), Wymore
patent: 2005/0021247 (2005-01-01), Liu et al.

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