Method of manufacturing a surface acoustic wave module

Details Method of manufacturing a surface acoustic wave module Method of manufacturing a surface acoustic wave module

1995-11-09

1998-10-06

Hall, Carl E.

Metal working

Piezoelectric device making

427100, H01L 4122

Patent

active

058159002

ABSTRACT:
A surface acoustic module is stable, and its operation frequencies can be varied with high precision. A method of manufacturing the surface acoustic module prevents the module's electrodes from being broken during separation of a sheet of modules into individual components. The surface acoustic module includes electrodes for transmitting and receiving a surface acoustic wave, a surface acoustic wave transmitting substrate, a high resistance thin film, and a thin film for differentiating the transmission velocity of a surface acoustic wave at the high resistance thin film from that at the substrate. The method includes the steps of forming a metallic film on a sheet of the surface acoustic wave transmitting substrate, of forming the electrodes on the metallic film, and of irradiating light or the like to the metallic film so as to increase the film's resistivity.

REFERENCES:
patent: 3766616 (1973-10-01), Standte
patent: 4672254 (1987-06-01), Dolat et al.
patent: 4933588 (1990-06-01), Greer
patent: 5298333 (1994-03-01), Maixner et al.
patent: 5343107 (1994-08-01), Shikata et al.

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