Method of manufacturing a surface acoustic wave device

Details Method of manufacturing a surface acoustic wave device Method of manufacturing a surface acoustic wave device

2008-09-26

2010-12-21

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S594000, C029S841000, C310S31300R, C310S31300R

Reexamination Certificate

active

07854050

ABSTRACT:
A surface acoustic wave device is enable to prevent electrode erosion, without any specific environmental process. The surface acoustic wave device includes a piezoelectric substrate, an electrode for the formation of surface acoustic wave, being formed on the piezoelectric substrate, on the piezoelectric substrate, a frame-shaped layer surrounding the electrode for the formation of surface acoustic wave, and a lid body formed on the frame-shaped layer by bonding, so as to form a hollow portion between the lid body and the electrode for the formation of surface acoustic wave. The frame-shaped layer and the lid body include photosensitive resin, and the lid body includes a through hole, and the through hole is sealed with a halogen-free thermosetting resin.

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patent: WO 2009/001650 (2008-12-01), None

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