Method of manufacturing a surface acoustic wave device

Details Method of manufacturing a surface acoustic wave device Method of manufacturing a surface acoustic wave device

2005-08-16

2005-08-16

Kim, Paul D (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S592100, C029S609100, C181S171000, C181S172000, C204S192150, C381S173000, C381S174000, C381S175000, C367S140000, C367S141000, C367S170000, C367S171000, C367S181000

Reexamination Certificate

active

06928720

ABSTRACT:
A surface acoustic wave device includes a piezoelectric substrate and at least one interdigital electrode disposed on the piezoelectric substrate. The interdigital electrode is made of α-tantalum.

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“Control of second order temperature coefficient of SAW propagating in two thin film layers”; Nakagawa, Y.; Ultrasonics Symposium, 1983. Proceedings., IEEE 1993, Oct. 31-Nov. 3, 1993 pp.: 287-290.

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