Method of manufacturing a surface acoustic wave device

Details Method of manufacturing a surface acoustic wave device Method of manufacturing a surface acoustic wave device

1992-09-16

1994-06-14

Hall, Carl E.

Coating processes

Electrical product produced

Piezoelectric properties

29 2535, 310313R, H01L 4122

Patent

active

053208650

ABSTRACT:
A method of manufacturing a surface acoustic wave device which has a smaller insertion loss and which operates at higher frequency than a conventional surface acoustic wave device is provided. The surface acoustic wave device includes a substrate, a diamond layer formed on the substrate, a piezoelectric layer formed on the diamond layer, and electrodes formed on any of the substrate, the diamond layer and the piezoelectric layer. The piezoelectric layer is formed by the laser ablation method. The insertion loss of this acoustic wave device is small even in a high frequency range of several hundreds MHz to GHz. Therefore, the device can be used as a frequency filter, a resonator, a delay line, a convolver, a correlator and the like.

REFERENCES:
patent: 4952832 (1990-08-01), Imai et al.

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