Method of manufacturing a superconducting pattern by light irrad

Details Method of manufacturing a superconducting pattern by light irrad Method of manufacturing a superconducting pattern by light irrad

1990-06-15

1999-06-15

Yamnitzky, Marie

Superconductor technology: apparatus, material, process

High temperature devices, systems, apparatus, com- ponents,...

Superconductor next to layer containing nonsuperconducting...

505236, 505239, 505191, 505701, 505703, 505704, 428210, 428688, 428930, H01L 3900

Patent

active

059122110

ABSTRACT:
A superconducting ceramic film is deposited on a substrate sputtering. In virtue of the low thermal conductivity of ceramic, a laser beam is radiated to the ceramic film in order to remove the irradiated portion by sublimation and produce a pattern on the ceramic film.

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Nakajima et al., Appl. Phys. Lett 53(15) Oct. 10, 1988, pp. 1437-1439.
Sahn et al., Overview of High Tc Supercond. 1988 ACS Chapter 1, pp. 1-13.

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