Method of manufacturing a substrate heating device

Details Method of manufacturing a substrate heating device Method of manufacturing a substrate heating device

2008-07-22

2008-07-22

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S592100, C029S612000, C029S613000, C029S618000, C029S619000, C073S204260, C219S443100, C219S445100, C219S448110, C219S468100

Reexamination Certificate

active

11059576

ABSTRACT:
A manufacturing method for a substrate heating device comprises forming a base plate having a substrate heating surface in which a resistance heating element is buried, forming a tubular member, joining the tubular member to the base plate, measuring temperature distribution in the substrate heating surface by supplying power to the resistance heating element, and grinding the tubular member according to a grinding condition based on a measurement result of the temperature distribution.

REFERENCES:
patent: 6809299 (2004-10-01), Hiramatsu et al.
patent: 6921881 (2005-07-01), Ito et al.
patent: 04-101381 (1992-04-01), None

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