Chemistry: electrical and wave energy – Processes and products
Patent
1989-05-02
1991-05-14
Niebling, John F.
Chemistry: electrical and wave energy
Processes and products
204 384, C25D 110
Patent
active
050153382
ABSTRACT:
A method for preparing a stamper comprises the steps of forming a first electro-conductive layer and a second electro-conductive layer on a photoresist layer carrying pits through a physical vapor deposition before the electroforming of a stamper layer. The second electro-conductive layer is effective for preventing the first electro-conductive layer from corroding during the electroforming step because of the active treatment solution for the electroforming and also avoids the corrosion of the first electro-conductive layer even in the storage period before the particular electroforming step.
REFERENCES:
patent: 4430401 (1984-02-01), Wilkinson
patent: 4474650 (1984-10-01), DeLaat
Ito Katsura
Koushiro Kenji
Kumasaka Osamu
Tabuchi Hirotoshi
Leader William T.
Niebling John F.
Pioneer Electronic Corp.
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