Method of manufacturing a spatial frequency filter for use in a

Details Method of manufacturing a spatial frequency filter for use in a Method of manufacturing a spatial frequency filter for use in a

1993-12-30

1995-01-03

Ben, Loha

Optical: systems and elements

Diffraction

Using fourier transform spatial filtering

359559, 430 5, 430 15, 356237, G02B 2746, G01B 900

Patent

active

053791509

ABSTRACT:
A spatial frequency filter used in a pattern defect detection device, including a pattern which includes a black spot having a diameter expanded by a controlled amount in comparison with the diameter of a black spot on a photosensitive plate obtained by exposure by diffracted light from a pattern on a model specimen.

REFERENCES:
patent: 3870414 (1975-03-01), Duffy
patent: 3905019 (1975-09-01), Aoki et al.
patent: 3970841 (1976-07-01), Green
patent: 4000949 (1977-01-01), Watkins
patent: 4330775 (1982-05-01), Iwamoto et al.
patent: 4599295 (1986-07-01), Kondo et al.
patent: 4806774 (1989-02-01), Lin et al.
patent: 4838644 (1989-06-01), Ochoa et al.
patent: 4929081 (1990-05-01), Yamamoto et al.
patent: 4958376 (1990-09-01), Leib
patent: 5067812 (1991-11-01), Sugimura et al.

Affiliated with

Also associated with

Rating

Method of manufacturing a spatial frequency filter for use in a does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of manufacturing a spatial frequency filter for use in a , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of manufacturing a spatial frequency filter for use in a will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2215291