Method of manufacturing a SOI DRAM

Details Method of manufacturing a SOI DRAM Method of manufacturing a SOI DRAM

1994-07-01

1996-12-17

Wilczewski, Mary

Fishing, trapping, and vermin destroying

437 52, 437 60, 437919, H01L 218242, H01L 2184

Patent

active

055852840

ABSTRACT:
A method of manufacturing a semiconductor memory device using a TFT(Thin Film Transistor) is disclosed. This invention not only increase the process margin between a bit line contact and a capacitor contact but also decreases current leakage between memory cells.

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