Fishing – trapping – and vermin destroying
Patent
1989-04-11
1991-07-02
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437922, 437225, 437974, 148DIG12, H01L 2176
Patent
active
050285580
ABSTRACT:
A method of manufacturing a silicon-on-insulator semiconductor body is characterized by the steps consisting in that a carrier body is temporarily connected to a supporting body with accurately flat and parallel major surfaces and having a thickness of at least 1/8 of the largest dimension of the carrier body, in that the free major surface of the carrier body is mechanically polished to a precision of at least 1/2 .mu.m flatness, in that the carrier body is detached from the supporting body and the polished major surface is temporarily connected to the supporting body and the other major surface of the carrier body is mechanically polished to a precision of at least 1/2 .mu.m flatness and a parallelism between the major surfaces of at least 1/2 .mu.m whereupon a semiconductor body is connected through a major surface permanently to a major surface of the carrier body, in that then the semiconductor body is mechanically ground to a thickness of at least 50 .mu.m larger than the desired ultimate layer thickness and is then alternately polished tribochemically and mechanically to a thickness of about 10 .mu.m larger than the ultimately desired layer thickness, and in that there is ultimately polished tribochemically until the desired layer thickness of the semiconductor body is attained.
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Adema Cornelis L.
De Bruin Johan G.
Haisma Jan
Michielsen Theodorus M.
Spierings Gijsbertus A. C. M.
Chaudhuri Olik
Graybill David E.
Miller Paul R.
U.S. Philips Corporation
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