Method of manufacturing a semiconductor device with an airtight

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Including contaminant removal or mitigation

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438118, 438122, 438123, 438124, H01L 2152, H01L 2156, H01L 2158, H01L 2160

Patent

active

060487542

ABSTRACT:
A process for manufacturing a package of a semiconductor device, and providing a semiconductor device in which a vapor-impermeable moistureproof plate is embedded in a bottom surface of a hollow package or an inner surface wallthicknesswise therefrom to provide moisture-proofness.

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