Method of manufacturing a semiconductor device utilizing selecti

Metal working – Method of mechanical manufacture – Assembling or joining

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29590, 29591, 148174, 148175, 148188, 357 34, 357 59, 357 65, 357 68, 427 85, 427 86, H01L 2120, H01L 21225

Patent

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044307934

ABSTRACT:
A semiconductor device is fabricated by a process in which an aperture (4) is an insulating layer (3) along a surface (2) of a semiconductor body is utilized in defining the lateral extents of zones (6, 7, and 8) in a circuit element of the device. In particular, the insulating layer is first provided with the aperture along the surface. A semiconductor layer (5) is formed on the insulating layer, including the portion within the aperture. Using the edge of the insulating layer along the aperture as a masking edge, a pair of opposite-conductivity dopants are introduced selectively into the aperture and a third dopant is introduced through all of the aperture into the body. The third dopant may be introduced into the body before the semiconductor layer is formed.

REFERENCES:
patent: 3611067 (1971-10-01), Oberlin et al.
patent: 4063901 (1977-12-01), Shiba
patent: 4074304 (1978-02-01), Shiba
patent: 4161745 (1979-07-01), Slob
patent: 4190949 (1980-03-01), Ikeda et al.
Kemlage, B. M., "Prevention of Metal to Base Shorting", I.B.M. Tech. Discl. Bull., vol. 13, No. 5, Oct. 1970, pp. 1299-1300.

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