Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal
Patent
1977-07-25
1979-01-30
Rutledge, L. Dewayne
Metal treatment
Process of modifying or maintaining internal physical...
Chemical-heat removing or burning of metal
29569L, 29578, 29580, 148172, 148175, 156654, 156655, 156662, 357 16, 357 18, 357 56, H01L 21308, H01L 21208
Patent
active
041371070
ABSTRACT:
The invention relates to a method in which a system of layers with a contact layer of gallium arsenide is formed epitaxially. In a second epitaxy treatment a layer of gallium aluminum arsenide is formed selectively. In order not to form the latter layer on the contact layer of gallium arsenide, the latter is shielded from gallium aluminum arsenide by means of a masking layer having a composition which differs from that of the layer to be provided selectively, so that the masking layer can afterwards be removed selectively.
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de Waard Peter J.
Nijman Willem
Biren Steven R.
Briody Thomas A.
Rutledge L. Dewayne
Saba W.G.
U.S. Philips Corporation
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