Fishing – trapping – and vermin destroying
Patent
1995-06-06
1997-11-04
Tsai, Jey
Fishing, trapping, and vermin destroying
437 52, 437919, H01L 2170, H01L 2700
Patent
active
056839294
ABSTRACT:
A capacitor includes a polycrystalline silicon layer 1 as a lower electrode layer, a dielectric layer 112, and a polycrystalline silicon layer 113 as an upper electrode layer. The dielectric layer 112 is formed by an oxynitride film 2, a silicon nitride film 3 and a top oxide film 4. A film thickness t.sub.3 of the top oxide film 4 is controlled to be less than 20 .ANG.. Capacitance of the capacitor can be increased while improving the duration of life of the dielectric layer, resulting in a highly reliable capacitor.
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Ajika Natsuo
Arima Hideaki
Ohi Makoto
Mitsubishi Denki & Kabushiki Kaisha
Tsai Jey
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