Method of manufacturing a semiconductor device and device manufa

Metal treatment – Compositions – Heat treating

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29578, 156 17, 357 9, 357 91, 148187, H01L 2126

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active

039516946

ABSTRACT:
A method of manufacturing a semiconductor device by means of doping via a mask. According to the invention a mask is used which is manufactured by providing one or more "first" apertures in a masking layer, after which islands of an isotropically growing material are grown in the said apertures, after which the parts of the masking layer present between the islands are removed and finally the said islands themselves are removed.

REFERENCES:
patent: 3413531 (1968-11-01), Leith
patent: 3431150 (1969-03-01), Dolan, Jr. et al.
patent: 3457632 (1969-07-01), Dolan, Jr. et al.
patent: 3589949 (1971-06-01), Nelson
patent: 3704177 (1972-11-01), Beale
patent: 3713922 (1973-01-01), Lepselter

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