Method of manufacturing a semiconductor device

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Making plural separate devices

Reexamination Certificate

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Details

C438S113000, C438S127000, C438S464000

Reexamination Certificate

active

06979593

ABSTRACT:
A semiconductor device is manufactured by covering a main surface of a wafer with protective tape, grinding a back side of the wafer to form an extremely thin wafer and affixing it to a dicing tape, dicing to form extremely thin semiconductor chips, picking up the chips and fixing each picked-up chip to a product forming area on a wiring substrate, removing the protective tape, performing wire bonding, covering the chips and wires of the wiring substrate with an insulating resin layer, forming bump electrodes on a back side of the wiring substrate, cutting the wiring substrate affixed to a support member together with the insulating resin layer, thereby forming plural semiconductor devices, and removing each semiconductor device from the support member.

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patent: 5009735 (1991-04-01), Ametani et al.
patent: 5641714 (1997-06-01), Yamanaka
patent: 6215179 (2001-04-01), Ohgiyama
patent: 6309909 (2001-10-01), Ohgiyama
patent: 6451671 (2002-09-01), Yamada
patent: 6555418 (2003-04-01), Kurosawa et al.
patent: 6649448 (2003-11-01), Tomihara
patent: 6713851 (2004-03-01), Umehara et al.
patent: 6797544 (2004-09-01), Sakai et al.
patent: 2002/0019066 (2002-02-01), Iketani
patent: 2002/0093076 (2002-07-01), Fujii et al.
patent: 10-27836 (1998-01-01), None

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