Method of manufacturing a semiconductor device

Details Method of manufacturing a semiconductor device Method of manufacturing a semiconductor device

2011-04-19

2011-04-19

Nguyen, Thanh (Department: 2893)

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

C438S104000, C438S240000, C257SE21208

Reexamination Certificate

active

07927890

ABSTRACT:
A method of manufacturing a semiconductor device including forming a lower electrode over a substrate, increasing the temperature of the substrate with the lower electrode to a predetermined temperature under mixture gas atmosphere of inert gas and oxygen gas, forming a dielectric film on the lower electrode by using an organic metal raw material after the temperature reaches the predetermined temperature, and forming an upper electrode on the dielectric film.

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