Method of manufacturing a self-aligned guard ring of a photo...

Details Method of manufacturing a self-aligned guard ring of a photo... Method of manufacturing a self-aligned guard ring of a photo...

2006-03-07

2006-03-07

Dang, Phuc T. (Department: 2818)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C438S320000, C438S328000

Reexamination Certificate

active

07008815

ABSTRACT:
A method of manufacturing a self-aligned guard ring of a photo diode. The method includes defining a photo diode region on a semiconductor substrate and an isolation matter surrounding the photo diode region, forming a photo sensor in the photo diode region, covering a first mask on the photo sensor, forming a spacer around the first mask, covering a second mask on an edge of the isolation matter, and utilizing the first mask, the second mask, and the spacer to form a self-aligned guard ring surrounding the photo sensor.

REFERENCES:
patent: 5596186 (1997-01-01), Kobayashi
patent: 6384462 (2002-05-01), Pauchard et al.

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