Method of manufacturing a reticule

Details Method of manufacturing a reticule Method of manufacturing a reticule

1990-03-13

1992-11-03

Lall, Parshotam S.

Boots, shoes, and leggings

364491, G06F 1520

Patent

active

051611147

ABSTRACT:
In a method of manufacturing reticules of the present invention, device pattern data is generated by shrinking (or magnifying) the pregenerated device pattern by calculation with determined shrinking ratio and meanwhile it is combined with alignment mark data of pregenerated alignment mark pattern in the determined shape and size and the combined data is then converted to the exposure data. As a result, in generating the reticule by shrinking the device pattern, a reticule having no positional displacement between the device pattern and alignment mark pattern can be easily generated in high efficiency.

REFERENCES:
patent: 3955072 (1976-05-01), Johannsmeier et al.
patent: 4103998 (1978-08-01), Nakazawa et al.
patent: 4777641 (1988-10-01), Inagaki et al.
patent: 4878177 (1989-10-01), Ikenaga et al.

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