Method of manufacturing a resonator device adapted for suppressi

Details Method of manufacturing a resonator device adapted for suppressi Method of manufacturing a resonator device adapted for suppressi

1998-02-13

2000-11-07

Hall, Carl E.

Metal working

Piezoelectric device making

310312, 310340, 310344, 310348, 310364, H01L 4122

Patent

active

061418447

ABSTRACT:
A resonator device having an insulating substrate, a strip-shaped vibrating element which is mounted on said insulating substrate and is provided with driving electrodes formed on the main opposing surfaces of a piezoelectric substrate, and terminal electrodes which are provided on said insulating substrate so as to be electrically connected with said driving electrodes and to which driving signals are applied by an external signal source. At least the longitudinal side portions of said vibrating element are coated with a surface active agent. With such a constitution, fluctuations in resonant resistance which are due to the excitation level can be suppressed, thereby contributing to the stable operation of the device, reducing the number of producing steps, and raising the yield rate in production.

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