Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2007-12-04
2007-12-04
Baumeister, B. William (Department: 2891)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C427S427100
Reexamination Certificate
active
11187829
ABSTRACT:
A method for manufacturing a quantum-dot element is disclosed. The method includes the following steps. First, a deposition chamber having at least one atomizer and a substrate-supporting base is provided. The atomizer is connected to a gas inlet and a sample inlet. Afterwards, a sample solution is prepared composed of a plurality of functionalized quantum dots dispersed in a solvent. Simultaneously, a substrate is placed on the substrate-supporting base in the deposition chamber. Finally, the sample solution and a gas are transferred into the atomizer through the sample inlet and the gas inlet respectively for generating quantum-dot droplets, which subsequently deposit on the substrate in the deposition chamber. The quantum-dot element manufactured by the present invention has a uniform distribution of quantum dots that have a small size and, therefore, the quality of the quantum-dot element can be substantially improved.
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patent: 5306345 (1994-04-01), Pellet et al.
patent: 6521048 (2003-02-01), Miller et al.
patent: 6984842 (2006-01-01), Nayfeh et al.
Chang Gwo-Yang
Chen Chien-Ming
Chen Hsueh-Shih
Lo Dai-Luon
Baumeister B. William
Industrial Technology Research Institute
Reames Matthew L.
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