Method of manufacturing a pointed electrode, and device for usin

Details Method of manufacturing a pointed electrode, and device for usin Method of manufacturing a pointed electrode, and device for usin

1993-03-24

1994-09-06

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 50, 20419215, H01J 902

Patent

active

053443527

ABSTRACT:
The manufacture of pointed electrodes (28) (field emitters) is considerably simplified by a directed sputtering deposition instead of by vapor deposition. Directed deposition of the material (12) to be sputtered can be effected by means of a collimating filter (4) and, if necessary, a cover plate (8).

REFERENCES:
patent: 4824544 (1989-04-01), Mikalesen et al.
patent: 4857161 (1989-08-01), Borel et al.
patent: 5007873 (1991-04-01), Goronkin et al.
patent: 5141459 (1992-08-01), Zimmerman
Rossnagel et al Journal of Vacuum Science Technology A 9(2), Mar./Apr. 1991 pp. 261-265.

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