Electric lamp or space discharge component or device manufacturi – Process – Electrode making
Patent
1991-07-15
1992-09-08
Ramsey, Kenneth J.
Electric lamp or space discharge component or device manufacturi
Process
Electrode making
445 24, 445 50, 313308, 313336, H01J 902
Patent
active
051454386
ABSTRACT:
A microelectronic device and a method of forming the same are disclosed. The microelectronic device includes a cathode, an anode and a first grid disposed adjacent a major surface of a substrate. The first grid is positioned between the cathode and the anode. The first grid is formed from conductive material using a sidewall spacer technique. The anode is made of conductive polysilicon, the cathode is made of tungsten and has a portion elevated from the substrate to aid in the ballistic transport of electrons. A second grid is formed using a sidewall spacer technique, and is positioned between the first grid and the anode. The method of making a microelectronic device includes forming an anode and a cathode on a surface of a substrate, then depositing, in series, first and second sacrificial layers. A first wall is formed by removing portion of the second sacrificial layer. The first wal is positioned between the anode and the cathode. A first conductive layer is deposited against the first wall and over the exposed second sacrificial layer and over exposed portions of the first sacrificial layer. A conductive sidewall spacer is formed against the first wall and between the anode and cathode by anisotropically etching the first conductive layer. The remaining portions of the first and second sacrificial layers are removed. The conductive sidewall spacer forms a first grid. A microelectronic device having a second grid is formed by the additional step of forming a second wall between the first wall and the anode.
REFERENCES:
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patent: 4948456 (1990-08-01), Schubert
patent: 4983878 (1991-01-01), Lee et al.
Brodie, Ivor, "Physical Considerations in Vacuum Microelectronics Devices", IEEE Transactions on Electron Devices, vol. 36, No. 11, Nov. 1989, pp. 2641-2644.
Busta, H. H., J. E. Pogemiller and M. F. Roth, "Lateral Miniaturized Vacuum Devices", IEDM, 1989, pp. 533-536.
O'Neill Daniel J.
Ramsey Kenneth J.
Xerox Corporation
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