Method of manufacturing a planar buried heterojunction laser

Details Method of manufacturing a planar buried heterojunction laser Method of manufacturing a planar buried heterojunction laser

1992-02-06

1993-06-01

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437944, 148DIG90, 148DIG100, H01L 2120

Patent

active

052159396

ABSTRACT:
In a method of manufacturing a planar buried heterojunction laser, after etching to delimit a laser stripe in relief on a substrate, lateral layers to surround the stripe are formed by a non-selective growth method not only at the sides of the stripe but also above it to create a parasitic projection. This projection is then removed after separation from the substrate by selective attack of a lift-off stripe which was deposited for this purpose above the stripe prior to this etching. Passages are formed for the attack medium used for this purpose. The invention can be applied in particular to the manufacture of fiber optic transmission systems.

REFERENCES:
patent: 4692206 (1987-09-01), Kaneiwa
patent: 4799227 (1989-01-01), Kaneiwa
patent: 4984244 (1991-01-01), Yamamoto
patent: 5084409 (1992-01-01), Beam, III et al.
patent: 5128276 (1992-07-01), Ambrosius et al.
H. Ishiguro, et al., "Very low threshold planar buried heterostructure . . . ", Applied Physics Letters, vol. 51, No. 12, 21 Sep. 1987, pp. 874-876.

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