Method of manufacturing a piezoelectric tuning fork resonator

Details Method of manufacturing a piezoelectric tuning fork resonator Method of manufacturing a piezoelectric tuning fork resonator

1993-09-21

1994-08-30

Hall, Carl E.

Metal working

Piezoelectric device making

310321, 310370, H01L 4122

Patent

active

053415507

ABSTRACT:
A piezoelectric tuning fork resonator having a piezoelectric substrate provided with a stepped portion on its end and a tuning fork arm portion formed in the stepped portion. A dummy substrate is arranged adjacent to a side of the piezoelectric substrate and a pair of sealing substrates are pasted onto upper and lower portions of the piezoelectric substrate and the dummy substrate to form a chip type piezoelectric tuning fork resonator. In another embodiment, the piezoelectric substrate includes a resin sealing portion having a hollow portion defined around the tuning fork arm portion so as to form a resin-coated piezoelectric tuning fork resonator.

REFERENCES:
patent: 3766616 (1973-10-01), Staudte
patent: 4302694 (1981-11-01), Fujishima et al.

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