Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2007-07-03
2007-07-03
Norton, Nadine (Department: 1765)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S363000, C310S364000, C310S365000, C310S366000, C216S013000
Reexamination Certificate
active
10811812
ABSTRACT:
A method of manufacturing a piezoelectric thin film resonator forms, after forming a piezoelectric film on a substrate so as to cover a lower electrode formed on the substrate, an electrode material layer for forming an upper electrode above the piezoelectric film, forms a mask of a predetermined form on the electrode material layer, and then etches the electrode material layer to form the upper electrode. Before a step of forming the electrode material layer, a protective layer for protecting the piezoelectric film during etching of the electrode material layer is formed so as to cover at least a part of the piezoelectric film where the upper electrode is not formed, and the electrode material layer is then formed so as to cover the protective layer.
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English language Abstract of JP 2001-251159.
English language Abstract of JP 58-137317. No Date Available.
English language Abstract of JP 58-153412. No Date Available.
English language Abstract of JP 60-171822. No Date Available.
English language Abstract of JP 9-64683. No Date Available.
English language Abstract of JP 10-200354. No Date Available.
English language Abstract and English Language Translation of Selected Portions of JP 10-126160. No date Available.
English language Abstract and English Language Translation of Selected Portions of JP 2002-335141.
English language Abstract and English Language Translation of Selected Portions of JP 2002-344280.
English language Abstract of JP 2001-77013.
English language Abstract of JP 10-126160. No Date Available.
English language Abstract of JP 2002-335141.
English language Abstract of JP 2002-344280.
English language computer-generated translation of JP 2002-344280.
Imura Masaaki
Komuro Eiju
Noguchi Takao
Saitou Hisatoshi
Dahimene Mahmoud
Greenblum & Bernstein P.L.C.
Norton Nadine
TDK Corporation
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