Method of manufacturing a piezoelectric thin film resonator

Details Method of manufacturing a piezoelectric thin film resonator Method of manufacturing a piezoelectric thin film resonator

2006-10-24

2006-10-24

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S831000, C029S832000, C029S846000, C029S847000

Reexamination Certificate

active

07124485

ABSTRACT:
A method of manufacturing a piezoelectric thin film resonator forms, after forming a piezoelectric film on a substrate so as to cover a lower electrode formed on the substrate, a resist layer so as to cover the piezoelectric film, forms a mask composed of the resist layer on the piezoelectric film by forming, in the resist layer, an exposure hole for exposing a formation part of an upper electrode on the piezoelectric film, forms an electrode material layer for forming the upper electrode on the piezoelectric film exposed via the exposure hole and on the mask, and then forms the upper electrode by removing the electrode material layer on the mask by removing the mask.

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