Method of manufacturing a piezoelectric thin film element

Details Method of manufacturing a piezoelectric thin film element Method of manufacturing a piezoelectric thin film element

2006-08-15

2006-08-15

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S830000, C029S831000, C029S832000, C029S847000, C310S317000

Reexamination Certificate

active

07089636

ABSTRACT:
The present invention provides a piezoelectric thin film element with superior piezoelectric properties in which the condition of the crystal of the piezoelectric thin film is appropriately controlled, and a manufacturing method thereof, as well as a inkjet recording head, inkjet printer, or other liquid ejecting apparatus employing the same. The piezoelectric thin film element40comprises a top electrode44, a bottom electrode42, and a piezoelectric thin film43formed between the top electrode44and the bottom electrode42, wherein the piezoelectric thin film43is structured so as to comprise a first layer431located nearest to the bottom electrode and second layers (433–436) that are located nearer to the top electrode than the first layer and that each have a thickness greater than that of the first layer431.

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