Metal working – Piezoelectric device making
Reexamination Certificate
2007-02-16
2010-12-21
Tugbang, A. Dexter (Department: 3729)
Metal working
Piezoelectric device making
C029S594000, C310S312000, C310S326000
Reexamination Certificate
active
07854049
ABSTRACT:
In a piezoelectric thin film device of the present invention, the degree of flexibility is enhanced in selection of a piezoelectric material constituting a piezoelectric thin film and the crystal orientation in the piezoelectric thin film. A piezoelectric thin film filter, including four film bulk acoustic resonators, has a configuration where a filter section for providing a filter function of the piezoelectric thin film filter is bonded with a flat base substrate mechanically supporting the filter section via an adhesive layer. In manufacturing of the piezoelectric thin film filter, a piezoelectric thin film is obtained by performing removal processing on a piezoelectric substrate, but the piezoelectric thin film obtained by removal processing cannot independently stand up under its own weight. For this reason, a prescribed member including the piezoelectric substrate is previously bonded to the base substrate as a support prior to the removal processing.
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“Chinese and Foreign Technique Information,” Dec. 31, 1995, Period 5, pp. 23-24.
Hamajima Akira
Iwata Yuichi
Suzuki Kengo
Yamaguchi Shoichiro
Yoshino Takashi
Burr & Brown
NGK Insulators Ltd.
NGK Optoceramics Co., Ltd.
Tugbang A. Dexter
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