Method of manufacturing a piezoelectric resonator

Details Method of manufacturing a piezoelectric resonator Method of manufacturing a piezoelectric resonator

1999-03-08

2000-01-18

Hall, Carl E.

Metal working

Piezoelectric device making

310365, 427100, H01L 4122

Patent

active

060147997

ABSTRACT:
A piezoelectric resonator is manufactured by providing a first mother substrate in which first strip electrodes are formed such that they extend in a second direction that is substantially perpendicular to a first direction, wherein a direction of a line extending between an excitation electrode and a lead electrode is a first direction. A second mother substrate is produced by cutting the first mother substrate at a cutting position such that the length of the first strip electrodes as measured in the first direction achieves an accurate and ideal electrode overlapping length for a target resonance frequency. The second strip electrodes are formed on the resultant second mother substrate using a mask and then the second mother substrate is cut thereafter.

REFERENCES:
patent: 5611129 (1997-03-01), Yoshimoto et al.
patent: 5622748 (1997-04-01), Takeuchi et al.

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