Method of manufacturing a piezoelectric print-head

Details Method of manufacturing a piezoelectric print-head Method of manufacturing a piezoelectric print-head

2005-02-22

2005-02-22

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Fluid pattern dispersing device making, e.g., ink jet

C029S025350, C029S830000, C029S831000, C029S832000, C427S100000, C216S027000, C430S320000

Reexamination Certificate

active

06857186

ABSTRACT:
A method of manufacturing a piezoelectric ink-jet print-head uses a metallic layer and a thick film layer with a slot hole therein instead of a ceramic vibration plate and an ink layer. The piezoelectric layer and the upper electrode layer are formed inside the ink cavity so that overall thickness of the print head is reduced. To form the ink-jet print head, a metallic layer and a lower electrode layer are sequentially formed over a substrate. A patterned piezoelectric layer and an upper electrode layer are sequentially formed over the lower electrode layer. A patterned thick film layer with a slot hole therein is formed over the metallic layer. The thick film layer and the metallic layer together form a cavity that encloses the piezoelectric layer and the upper electrode layer. A nozzle plate having a nozzle thereon is attached to the thick film layer. The nozzle plate, the thick film layer and the metallic layer together form an ink cavity. The hole in the nozzle is continuous with the ink cavity.

REFERENCES:
patent: 5612724 (1997-03-01), Murakami et al.
patent: 5852337 (1998-12-01), Takeuchi et al.
patent: 5933167 (1999-08-01), Shimada et al.
patent: 6013970 (2000-01-01), Nishiwaki et al.
patent: 6209994 (2001-04-01), Furuhata et al.

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