Metal working – Piezoelectric device making
Reexamination Certificate
2005-01-24
2008-03-18
Tugbang, A. Dexter (Department: 3729)
Metal working
Piezoelectric device making
C029S846000, C347S068000, C310S364000, C427S100000, C427S126300
Reexamination Certificate
active
07343654
ABSTRACT:
Provided are a piezoelectric element, a method of manufacturing the same, and a liquid jet head, which can improve, and homogenize, characteristics of a piezoelectric layer. Included are: a step of forming a seed titanium layer interposed therebetween, the seed titanium layer being formed at a desired film thickness by applying by titanium (Ti), at least twice; and a step of forming a piezoelectric precursor film by applying a piezoelectric material on the seed titanium layer, thereafter crystallizing the piezoelectric precursor film by baking, and thereby forming the piezoelectric layer.
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NB 82081697, IBM Technical Disclosure Bulletin, “Device Structure and Fabrication Process for a Fundamental Mode Acoustical”, Aug. 1982, vol. 25, Issue No. 3B, p. 1697-1700.
Seiko Epson Corporation
Tugbang A. Dexter
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