Method of manufacturing a piezoelectric component

Details Method of manufacturing a piezoelectric component Method of manufacturing a piezoelectric component

2011-03-29

2011-03-29

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C438S778000, C310S31300R, C310S340000, C310S349000, C310S365000

Reexamination Certificate

active

07913367

ABSTRACT:
A piezoelectric component with a piezoelectric element includes a piezoelectric substrate, at least one oscillating section formed on the piezoelectric substrate, and an element wiring section connected to the oscillating section. A side face side hollow section forming layer and a lid face side hollow section forming layer made of photosensitive resin surround the top face and side face of the oscillating section while forming a gap so as to provide a hollow section.

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Machine Translation of JP 2005-252335.
European Search Report dated Mar. 25, 2009.

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