Method of manufacturing a piezoelectric actuator and liquid...

Details Method of manufacturing a piezoelectric actuator and liquid... Method of manufacturing a piezoelectric actuator and liquid...

2006-12-12

2010-02-16

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S842000, C029S831000, C310S324000

Reexamination Certificate

active

07661180

ABSTRACT:
The method of manufacturing a piezoelectric actuator includes the steps of: carrying out a first heat treatment of a diaphragm of stainless steel containing iron, chromium and aluminum, in a gas containing oxygen, so as to form an aluminum oxide film on a first surface of the diaphragm and form a chromium oxide film between the aluminum oxide film and the first surface of the diaphragm; forming a lower electrode on the aluminum oxide film; forming a piezoelectric body on a surface of the lower electrode reverse to a surface of the lower electrode on which the chromium oxide film and the aluminum oxide film are formed; forming an upper electrode on a surface of the piezoelectric body reverse to a surface of the piezoelectric body on which the lower electrode is formed; and calcining the piezoelectric body by carrying out a second heat treatment of the diaphragm with which the piezoelectric body is provided.

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