Method of manufacturing a passage tube for passing plasma produc

Plastic and nonmetallic article shaping or treating: processes – Outside of mold sintering or vitrifying of shaped inorganic... – Shaping or treating of multilayered – impregnated – or...

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Details

264632, 264643, 264655, 264678, 156 8911, C04B 3332

Patent

active

059619163

ABSTRACT:
A passage tube including a ceramic tube body through which plasma producing gas passes and is irradiated from outside the ceramic tube body with ultraviolet rays, and a ceramic flange member joined to an outer peripheral surface of the ceramic tube body, is manufactured by forming calcined bodies for the passage tube body and flange member, machining the calcined body for the tube body so as to form a first portion and a second portion having an outer diameter larger than that of the first portion, joining the calcined body for the flange member to a stepped region between the first portion and the second portion and sintering them.

REFERENCES:
patent: 4330496 (1982-05-01), Desplanches et al.
patent: 4940843 (1990-07-01), Adachi et al.
patent: 5106550 (1992-04-01), Yogo et al.
patent: 5814818 (1998-09-01), Ohashi et al.

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