Method of manufacturing a miniaturized three- dimensional...

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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C029S605000, C029S841000, C029S856000, C029S858000, C029S883000, C174S050510, C174S260000, C336S200000, C336S219000, C336S223000, C361S761000, C438S381000, C438S627000, C438S637000, C438S643000

Reexamination Certificate

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10475383

ABSTRACT:
Manufacturing of miniaturized three-dimensional electric components are presented, as well as components manufactured by the methods. The manufacturing methods comprise micro-replication of at least one master structure, e.g. via a mould structure, in at least one polymer layer onto which layer at least one conductive path is provided.

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patent: 6447449 (2002-09-01), Fleischman et al.
patent: 01301880 (1989-12-01), None
patent: WO 01/25139 (2001-04-01), None
“Toroidal coil winding machines making the best choice”; Mirza, N.I.; Electrical Electronics Insulation Conference and Electrical Manufacturing & Coil Winding Conference, 1993. Proceedings., Chicago '93 EEIC/ICWA Exposition; Oct. 4-7, 1993; pp. 243-250.
J. Yoon, C. Han, E. Yoon and C. Kim, “Monolithic Integration of 3-D Electroplated Microstructures With Unlimited Number of Levels Using Planarization With a Sacrificial Metallic Mold(PSMM),” IEEE MEMS- 1999, pp. 624-629.
T. O'Donnell, P. McCloskey, M. Brunet, R. Winfield, S. O Mathuna, A. Stephen and S. Metev, “High Aspect Ratio RF Coils Fabricated Using Laser Processing and Micro-Moulding Techniques,” IMAPS—Europe Prague, Czech Republic, Jun. 18-20, 2000, pp. 169-174.
Y. Kim and M. Allen, “Surface Micromachined Solenoid Inductors for High Frequency Applications,” IEEE Transactions on Components, Packaging and Manufacturing Technology—Part C, vol. 21, No. 1, Jan. 1998, pp. 26-33.

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