Method of manufacturing a microphone

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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Details

C029S417000, C029S609100, C216S062000, C216S066000, C381S170000, C381S355000, C381S358000, C381S360000, C381S368000

Reexamination Certificate

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07434305

ABSTRACT:
A silicon condenser microphone package is disclosed. The silicon condenser microphone package comprises a transducer unit, substrate, and a cover. The substrate includes an upper surface having a recess formed therein. The transducer unit is attached to the upper surface of the substrate and overlaps at least a portion of the recess wherein a back volume of the transducer unit is formed between the transducer unit and the substrate. The cover is placed over the transducer unit and includes an aperture.

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