Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2006-12-26
2006-12-26
Kim, Paul D. (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S592100, C029S595000, C029S603010, C310S309000
Reexamination Certificate
active
07152300
ABSTRACT:
A microactuator includes a stationary element, a movable element, and a first microstructure. The stationary element is fixed on a substrate and has a plurality of stationary element electrodes arranged at a predetermined pitch. The movable element has a plurality of movable element electrodes opposing to the stationary element electrodes. The movable element is moved by applying a voltage across the stationary element and the movable element. The first microstructure is formed on at least one of the opposing surfaces of the movable element and the stationary element to prevent the movable element from attaching to the stationary element.
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Denso Corporation
Kim Paul D.
Posz Law Group , PLC
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