Metal working – Piezoelectric device making
Patent
1993-11-10
1995-10-03
Hall, Carl E.
Metal working
Piezoelectric device making
310369, 427100, H01L 4122
Patent
active
054541468
ABSTRACT:
A microactuator having a piezoelectric material and a drive electrode formed adjacent to the piezoelectric material is manufactured by forming an electroplating electrode on a substrate and providing a photosensitive material layer on the substrate on which the electroplating electrode is formed. The photosensitive material layer is exposed in a desired pattern. The exposed photosensitive material layer is developed to partially remove the exposed photosensitive material layer. A metal with electroplating is filled in a substrate portion from which the photosensitive material layer is removed, so that a drive electrode is formed. A remaining photosensitive material layer is removed. Finally, a piezoelectric material is selectively filled in a substrate portion adjacent to the drive electrode.
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Fushimi Masahiro
Murakami Tomoko
Takagi Hiroshi
Yagi Takayuki
Canon Kabushiki Kaisha
Hall Carl E.
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