Method of manufacturing a micro-electrical-mechanical system...

Details Method of manufacturing a micro-electrical-mechanical system... Method of manufacturing a micro-electrical-mechanical system...

2011-08-02

2011-08-02

Smith, Matthew (Department: 2823)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Thermally responsive

C438S051000, C257S414000, C257S467000

Reexamination Certificate

active

07989249

ABSTRACT:
A method of manufacturing a micro-electrical-mechanical system with thermally isolated active elements. Such a system may embody a bolometer, which is well suited for detecting electromagnetic radiation between 90 GHz and 30 THz while operating at room temperature. The method also discloses a generalized process for manufacturing circuitry incorporating active and passive micro-electrical-mechanical systems in a silicon wafer.

REFERENCES:
patent: 4590505 (1986-05-01), Bluzer
patent: 7375333 (2008-05-01), Bluzer et al.
patent: 2004/0219706 (2004-11-01), Wan
patent: 2005/0087687 (2005-04-01), Bluzer
patent: 2006/0131506 (2006-06-01), Shigenaka et al.
patent: 2007/0131861 (2007-06-01), Bluzer et al.
International Search Report, and Written Opinion, Application No. PCT/US 10/23154, dated Mar. 23, 2010, 8 pages.

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