Method of manufacturing a membrane sensor

Details Method of manufacturing a membrane sensor Method of manufacturing a membrane sensor

2005-06-07

2005-06-07

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S714000, C029S592000, C029S594000, C381S175000

Reexamination Certificate

active

06901804

ABSTRACT:
This invention relates to a differential pressure sensor, one embodiment of which is a microphone. The differential pressure sensor comprises: a flexible membrane (7) made of conductive material, which membrane forms a first electrode of the differential pressure sensor, and a perforated plate (6) made of conductive material, which plate is essentially more rigid than said membrane (7), which plate is arranged at a distance from the membrane, and which plate forms a second electrode of the differential pressure sensor. In order to provide a differential pressure sensor with as good properties as possible, the differential pressure sensor comprises a substrate (4), a cavity (10) extending through the substrate, the walls of which cavity are formed of said substrate (4). The membrane (7) is closely connected to the walls of the cavity (10), whereby the membrane forms a dense wall in said cavity, and said perforated plate (6, 6′) has been attached to the substrate with an insulating layer (5).

REFERENCES:
patent: 5369544 (1994-11-01), Mastrangelo
patent: 5679902 (1997-10-01), Ryhanen
patent: 5944970 (1999-08-01), Rosenblatt
patent: 5949118 (1999-09-01), Sakai et al.
patent: 6140689 (2000-10-01), Scheiter et al.
patent: 40 21 661 (1991-02-01), None
patent: 197 41 046 (1999-05-01), None

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