Dynamic information storage or retrieval – Storage medium structure – Optical track structure
Patent
1993-01-14
1994-09-13
Dzierzynski, Paul M.
Dynamic information storage or retrieval
Storage medium structure
Optical track structure
3692754, 369277, 430270, 430323, 430496, G11B 726
Patent
active
053475100
ABSTRACT:
A master plate for manufacturing a stamper for injecting molding of an optical memory device has a substrate having a plurality of guiding grooves on a surface thereof with a predetermined interval. The respective edge portions of the guiding grooves are inclined with respect to the surface of the substrate at an angle not more than 30.degree.. According to a manufacturing method of the master plate, the post-baking process is carried out at a baking temperature of not less than 150.degree. C. and an etching gas containing O.sub.2 gas of 4 (SCCM) to 10 (SCCM) is used. Thus, even when the copying is carried out with respect to the substrate of the optical memory device according to the injection molding process wherein the stamper, which is manufactured based on the above-mentioned master plate, is used, the mold release of the stamper can be carried out without being caught by the substrate. Thus, it is possible to keep the respective shapes of the guiding grooves of the s tamper, thereby enabling of manufacturing the substrate of the optical memory device with high repeatability.
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Hirokane Junji
Katayama Hiroyuki
Mieda Michinobu
Nakayama Junichiro
Ohta Kenji
Chu Kim-Kwok
Dzierzynski Paul M.
Sharp Kabushiki Kaisha
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