Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2005-12-07
2010-10-26
Tugbang, A. Dexter (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603140, C029S603120, C029S603160, C029S603180, C360S122000, C427S131000, C216S048000, C216S106000, C204S192340
Reexamination Certificate
active
07818875
ABSTRACT:
A method of manufacturing a magnetic write head that provides improved pole critical dimension control, such as improved track width control (improved sigma) and improved flare point control. The method involves a combination of several process improvements, such as photolithographically patterning a P2pole tip defining photoresist frame using a zero print bias and also using a small flash field. The method also involves the use of a non-reactive ion etch to notch the first pole (P1) using the second pole (P2) as a mask.
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Balamame Hamid
Bedell Daniel Wayne
Gutberlet Mary Kathryn
Hsieh Clarence Kai-Sheng
Pentek Aron
Hitachi Global Storage Technologies - Netherlands B.V.
Tugbang A. Dexter
Zilka-Kotab, PC
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