Method of manufacturing a liquid jet head and a liquid jet...

Details Method of manufacturing a liquid jet head and a liquid jet... Method of manufacturing a liquid jet head and a liquid jet...

2009-02-24

2011-11-15

Feggins, Kristal (Department: 2861)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C029S025350

Reexamination Certificate

active

08057018

ABSTRACT:
A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.

REFERENCES:
patent: 6243941 (2001-06-01), Kashiwaya et al.
patent: 7681989 (2010-03-01), Lee et al.
patent: 2007/0199185 (2007-08-01), Thalhammer et al.
patent: 2005-088441 (2005-04-01), None

Affiliated with

Also associated with

Rating

Method of manufacturing a liquid jet head and a liquid jet... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of manufacturing a liquid jet head and a liquid jet..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of manufacturing a liquid jet head and a liquid jet... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4271837