Method of manufacturing a high voltage transistor in a semicondu

Fishing – trapping – and vermin destroying

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437228, 437 80, 437984, 148DIG143, H01L 21336, H01L 21033

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active

055630804

ABSTRACT:
The present invention discloses a structure of a transistor in a semiconductor device and a method of manufacturing the same. The present invention manufactures a high voltage transistor by etching a silicon substrate to a depth deeper than that of the field oxide film by a self-aligned wet etching process using the field oxide film as a mask and, thereafter, by forming the first gate electrode which electrically switches ON and OFF between the source region and the drain region by using a gate electrode mask and simultaneously forming a second gate electrode to prevent a junction breakdown below the bird's beak of the field oxide film. Accordingly, the present invention can improve the degree of integration of the device by forming a gate electrode to prevent a junction breakdown below the bird's beak of the field oxide film.

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patent: 4313256 (1982-02-01), Widmann
patent: 4667395 (1987-05-01), Ahlgren et al.
patent: 5132238 (1992-07-01), Murakami et al.
patent: 5200351 (1993-04-01), Hadijizadeh-Amini

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