Metal working – Piezoelectric device making
Patent
1993-03-26
1994-07-12
Hall, Carl E.
Metal working
Piezoelectric device making
298901, H01L 4122
Patent
active
053276272
ABSTRACT:
A method of manufacturing a print head for an ink-jet printer comprises steps of: forming a main plate (1) by superposing a first piezoelectric plate (2), a first low-rigidity plate (5), a second low-rigidity plate (6) and a second piezoelectric plate (3) in that order in a laminated structure; cutting a plurality of parallel first and second grooves (7, 9) through the first piezoelectric plate into the first low-rigidity plate and through the second piezoelectric plate into the second low-rigidity plate, respectively, by grinding to form first and second walls (8, 10); forming first and second electrodes (14, 15) respectively over the side surfaces of the first and second walls (8, 10); attaching a top plate (17) and a bottom plate (18) respectively to the outer surfaces of the first and second piezoelectric plates (2, 3) to form first and second pressure chambers (22, 23) respectively in the opposite sides of the main plate (1); and attaching an orifice plate (20) provided with a plurality of ink jets ( 19) to the end surface of the main plate (1) so that the ink jets (19) coincide respectively with the first and second pressure chambers (22, 23).
Miyazawa Toshio
Ochiai Kuniaki
Hall Carl E.
Tokyo Electric Co. Ltd.
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