Method of manufacturing a gas detection sensor, and the resultin

Details Method of manufacturing a gas detection sensor, and the resultin Method of manufacturing a gas detection sensor, and the resultin

1989-12-06

1991-01-29

Silverman, Stanley

Coating processes

Electrical product produced

Metallic compound coating

4272552, 4272553, B05D 512

Patent

active

049885391

ABSTRACT:
A method of manufacturing a sensor for detecting trace or impurity gases, the method comprising evaporating tin and/or tin oxides under a partial pressure of oxygen in order to condense vapor on an electrically insulating substrate to obtain a porous layer deposit therein. The metal or the metal oxides is/are evaporated under a flow of a mixture of gases containing both oxygen and an inert gas at a total pressure of not less than 100 pascals and with the partial pressure of the oxygen in the mixture being not more than 130 pascals.

REFERENCES:
patent: 4504522 (1985-03-01), Kaiser et al.
Extended Abrstracts, vol. 80-2, Oct. 1980, pp. 1367-1369, resume No. 547, Princeton, N.J., U.S.; H. Ogawa et al.: "A new type ultrafine particle gas sensor".

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